ELECTRONIC MICROSCOPY PRODUCTS
TESCAN SOLARIS X
A Plasma FIB-SEM platform for deep sectioning and the highest resolution end-pointing for package level failure analysis
– Curtaining-free large-area cross-sectioning for physical failure analysis of advanced packaging technologies.
– Prepare large area FIB-cross-sections up to 1 mm wide.
– Obtain low noise, high-resolution image at low keVs in short acquisition time at FIB-SEM coincidence with the sample tilted.
– Live SEM-monitoring during FIB milling for precise end-pointing.
– Observe the most beam-sensitive materials using low keVs ultra-high resolution for surface sensitivity and high material contrast.
– Effective techniques and recipes for fast and artefact-free cross-sectioning of composite samples (OLED and TFT displays, MEMS devices, isolation dielectrics) at high currents
– Essence™ easy-to-use modular user interface
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