ELECTRONIC MICROSCOPY PRODUCTS
TESCAN SOLARIS Microeletronics
An alternative solution for semi-automated high-quality TEM lamella preparation
AutoLoader consists of two parts, sample magazine and loading mechanism.
– Low-kV ultra-high-resolution imaging of high-end semiconductor devices
– Precise end-pointing at low electron beam energies
– Gentle FIB thinning for improved quality results in TEM sample preparation enabled by excellent low-kV ion beam performance
– Optimized workflows and recipes for easy preparation of ultra-thin TEM lamellae
– Semi-automated software module for site-specific TEM lamella preparation
– Preparation of advanced geometry TEM lamellae from the most advanced semiconductor nodes
– Specialized, load-lock-compatible stage carousel for TEM sample preparation
– Dedicated TEM grid holders with fully optimized geometry for advanced TEM sample preparation
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